Cryogenic pull-down voltage of microelectromechanical switches

Engineering

• Electric Potential 83%
• Membrane 50%
• Bridges 33%
• Cryogenic Temperature 33%
• Demonstrates 16%
• Experimental Result 16%
• Temperature 16%
• Thin Films 16%
• Prediction 16%
• Temperature Dependence 16%
• Film Material 16%
• Substrate Material 16%
• Mechanical Properties 16%
• Actuation 16%
• Early Work 16%

Material Science

• Switch 100%
• Membrane 50%
• Electrostatic Interaction 33%
• Thin Films 16%
• Mechanical Property 16%
• Dielectric Material 16%

Chemistry

• Voltage 83%
• Conductor 33%
• Reaction Temperature 16%
• Dielectric Material 16%
• Mechanical Property 16%
• Cryogenics 16%