TY - JOUR
T1 - Reliability of suspended bridges on superconducting microstrip filters using MEMS switches
AU - Vargas, Jorge M.
AU - Bogozi, Albert
AU - Noel, Julien
AU - Hijazi, Yazan
AU - Vlasov, Yuriy A.
AU - Larkins, Grover L.
N1 - Funding Information:
Manuscript received August 03, 2010; accepted November 10, 2010. Date of publication December 23, 2010; date of current version May 27, 2011. This work was supported by the US Air Force Office of Scientific Research. J. M. Vargas and Y. Hijazi are with Universidad del Turabo, Gurabo, PR 00778 USA (e-mail: [email protected]). A. Bogozi is with the Air Force Research Laboratory, Wright-Patterson Air Force Base, OH 45433 USA. J. Noel is with Universidad Nacional de Ingeniería (UNI), Lima, Perú. Y. A. Vlasov and G. L. Larkins, Jr., are with Florida International University, Miami, FL 33174 USA (e-mail: [email protected]). Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TASC.2010.2092736
PY - 2011/6
Y1 - 2011/6
N2 - This work proposes to use capacitive micro-electromechanical systems (MEMS) switches built on a superconducting microstrip hairpin filter to investigate the reliability of MEMS for long term survivability. This device is made of a YBa2Cu3O7 thin film deposited on a 20 mm × 20 mm LaAlO3 substrate by pulsed laser deposition and BaTiO3 by RF magnetron sputtering, which is utilized as a dielectric insulation layer at the switching points of contact. The major concern for capacitive MEMS switches is stiction between the gold suspended bridge membrane (top layer) and the dielectric material (bottom layer). The main failure mode results from charge build-up at the bottom layer which in turn depends on the actuation voltage. The actuation voltage measured at room and cryogenic temperature is used to derive and calculate the Young's modulus formula which takes into consideration the device geometry, residual stress and mechanical properties of the device. Modified Young's modulus equation will be validated through reliability data of membrane actuation and failure mode. This equation will in turn be used in modeling other RF MEMS devices operating at cryogenic temperatures.
AB - This work proposes to use capacitive micro-electromechanical systems (MEMS) switches built on a superconducting microstrip hairpin filter to investigate the reliability of MEMS for long term survivability. This device is made of a YBa2Cu3O7 thin film deposited on a 20 mm × 20 mm LaAlO3 substrate by pulsed laser deposition and BaTiO3 by RF magnetron sputtering, which is utilized as a dielectric insulation layer at the switching points of contact. The major concern for capacitive MEMS switches is stiction between the gold suspended bridge membrane (top layer) and the dielectric material (bottom layer). The main failure mode results from charge build-up at the bottom layer which in turn depends on the actuation voltage. The actuation voltage measured at room and cryogenic temperature is used to derive and calculate the Young's modulus formula which takes into consideration the device geometry, residual stress and mechanical properties of the device. Modified Young's modulus equation will be validated through reliability data of membrane actuation and failure mode. This equation will in turn be used in modeling other RF MEMS devices operating at cryogenic temperatures.
KW - Actuation voltage
KW - MEMS switch
KW - Microstrip hairpin filter
KW - Stiction
KW - Superconductor
KW - Young's elastic modulus
UR - http://www.scopus.com/inward/record.url?scp=79957936366&partnerID=8YFLogxK
U2 - 10.1109/TASC.2010.2092736
DO - 10.1109/TASC.2010.2092736
M3 - Article
AN - SCOPUS:79957936366
SN - 1051-8223
VL - 21
SP - 567
EP - 570
JO - IEEE Transactions on Applied Superconductivity
JF - IEEE Transactions on Applied Superconductivity
IS - 3 PART 1
M1 - 5672812
ER -