Cryogenic pull-down voltage of microelectromechanical switches

Engineering

• Cryogenic Temperature 100%
• Waveguide 100%
• Experimental Result 50%
• Substrate Material 50%
• Early Work 50%
• Dielectrics 50%
• Actuation 50%
• Temperature Dependence 50%
• Thin Films 50%
• Film Material 50%
• Electrostatic Force 50%
• Mechanical Property 50%

Physics

• Waveguide 100%
• Cryogenic Temperature 100%
• Electrostatics 50%
• Temperature Dependence 50%
• Dielectric Material 50%
• Thin Films 50%